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(a) Multiple-scattering energy distribution function ( p ω m (θ , φ; b

(a) Multiple-scattering energy distribution function ( p ω m (θ , φ; b

(a) Multiple-scattering energy distribution function ( p ω m (θ , φ; b

Electron energy distribution function under the oxygen concentrations

(a) Multiple-scattering energy distribution function ( p ω m (θ , φ; b Electron energy distribution function under the oxygen concentrations

(a) Multiple-scattering energy distribution function ( p ω m (θ , φ; b Electron energy distribution function under the oxygen concentrations

Electron energy distribution function, calculated with LoKI-B for argon

Electron energy distribution function, calculated with LoKI-B for argon (a) Multiple-scattering energy distribution function ( p ω m (θ , φ; b Electron energy distribution function under the oxygen concentrations

Electron energy distribution function under the oxygen concentrations (a) Multiple-scattering energy distribution function ( p ω m (θ , φ; b Electron energy distribution function, calculated with LoKI-B for argon

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| Energy distribution function (EDF) of the sputtered Pt atoms. Ar ion

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Theoretical Characterization of Electron Energy Distribution Function

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Radial Distribution Functions

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